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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/KocaayRCCLW18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alicja_Lesniewska>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Deniz_Kocaay>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ivan_Ciofi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kristof_Croes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philippe_Roussel>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS.2018.8353670>
foaf:homepage <https://doi.org/10.1109/IRPS.2018.8353670>
dc:identifier DBLP conf/irps/KocaayRCCLW18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS.2018.8353670 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
rdfs:label Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alicja_Lesniewska>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Deniz_Kocaay>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ivan_Ciofi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kristof_Croes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philippe_Roussel>
swrc:pages 10-1 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2018>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/irps/KocaayRCCLW18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/irps/KocaayRCCLW18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2018.html#KocaayRCCLW18>
rdfs:seeAlso <https://doi.org/10.1109/IRPS.2018.8353670>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title Method to assess the impact of LER and spacing variation on BEOL dielectric reliability using 2D-field simulations for <20nm spacing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document