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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/MoreauBJALFL23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bassel_Ayoub>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Bouchu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/H%E2%88%9A%C2%A9l%E2%88%9A%C2%AEne_Fr%E2%88%9A%C2%A9mont>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Jourdon>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._Lamontagne>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Lhostis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/St%E2%88%9A%C2%A9phane_Moreau>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS48203.2023.10118173>
foaf:homepage <https://doi.org/10.1109/IRPS48203.2023.10118173>
dc:identifier DBLP conf/irps/MoreauBJALFL23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS48203.2023.10118173 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Recent Advances on Electromigration in Cu/SiO2 to Cu/SiO2 Hybrid Bonds for 3D Integrated Circuits. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bassel_Ayoub>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Bouchu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/H%E2%88%9A%C2%A9l%E2%88%9A%C2%AEne_Fr%E2%88%9A%C2%A9mont>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Jourdon>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._Lamontagne>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Lhostis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/St%E2%88%9A%C2%A9phane_Moreau>
swrc:pages 1-7 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2023>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2023.html#MoreauBJALFL23>
rdfs:seeAlso <https://doi.org/10.1109/IRPS48203.2023.10118173>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title Recent Advances on Electromigration in Cu/SiO2 to Cu/SiO2 Hybrid Bonds for 3D Integrated Circuits. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document