Intrinsic Reliability of BEOL interlayer dielectric.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/irps/PalmerZWLPK21
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/irps/PalmerZWLPK21
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Cheyun_Lin
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Christopher_Perini
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Galor_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/James_Palmer
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Justin_R._Weber
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Rahim_Kasim
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FIRPS46558.2021.9405089
>
foaf:
homepage
<
https://doi.org/10.1109/IRPS46558.2021.9405089
>
dc:
identifier
DBLP conf/irps/PalmerZWLPK21
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FIRPS46558.2021.9405089
(xsd:string)
dcterms:
issued
2021
(xsd:gYear)
rdfs:
label
Intrinsic Reliability of BEOL interlayer dielectric.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Cheyun_Lin
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Christopher_Perini
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Galor_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/James_Palmer
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Justin_R._Weber
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Rahim_Kasim
>
swrc:
pages
1-2
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/irps/2021
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/irps/PalmerZWLPK21/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/irps/PalmerZWLPK21
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/irps/irps2021.html#PalmerZWLPK21
>
rdfs:
seeAlso
<
https://doi.org/10.1109/IRPS46558.2021.9405089
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/irps
>
dc:
title
Intrinsic Reliability of BEOL interlayer dielectric.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document