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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/SekiNM20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Harumi_Seki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Nakasaki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuichiro_Mitani>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS45951.2020.9128224>
foaf:homepage <https://doi.org/10.1109/IRPS45951.2020.9128224>
dc:identifier DBLP conf/irps/SekiNM20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS45951.2020.9128224 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Harumi_Seki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Nakasaki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuichiro_Mitani>
swrc:pages 1-7 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/irps/SekiNM20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/irps/SekiNM20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2020.html#SekiNM20>
rdfs:seeAlso <https://doi.org/10.1109/IRPS45951.2020.9128224>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document