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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/ShenWZBSZGBW20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_Greene>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Erin_Stuckert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huimei_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jingyun_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Koji_Watanabe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Miaomiao_Wang_0006>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michael_Belyansky>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tian_Shen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Veeraraghavan_S._Basker>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS45951.2020.9129258>
foaf:homepage <https://doi.org/10.1109/IRPS45951.2020.9129258>
dc:identifier DBLP conf/irps/ShenWZBSZGBW20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS45951.2020.9129258 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label A new technique for evaluating stacked nanosheet inner spacer TDDB reliability. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_Greene>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Erin_Stuckert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huimei_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jingyun_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Koji_Watanabe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Miaomiao_Wang_0006>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michael_Belyansky>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tian_Shen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Veeraraghavan_S._Basker>
swrc:pages 1-5 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/irps/ShenWZBSZGBW20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/irps/ShenWZBSZGBW20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2020.html#ShenWZBSZGBW20>
rdfs:seeAlso <https://doi.org/10.1109/IRPS45951.2020.9129258>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title A new technique for evaluating stacked nanosheet inner spacer TDDB reliability. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document