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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/irps/ViciDRFKW23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrea_Vici>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ben_Kaczer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jacopo_Franco>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philippe_J._Roussel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Robin_Degraeve>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FIRPS48203.2023.10117955>
foaf:homepage <https://doi.org/10.1109/IRPS48203.2023.10117955>
dc:identifier DBLP conf/irps/ViciDRFKW23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FIRPS48203.2023.10117955 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrea_Vici>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ben_Kaczer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ingrid_De_Wolf>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jacopo_Franco>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philippe_J._Roussel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Robin_Degraeve>
swrc:pages 1-7 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/irps/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/irps/ViciDRFKW23/dblp>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/irps/irps2023.html#ViciDRFKW23>
rdfs:seeAlso <https://doi.org/10.1109/IRPS48203.2023.10117955>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/irps>
dc:title Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document