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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iscas/SugiharaTNIHKHKMMO06>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroaki_Hayashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Katsumi_Kishimoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Katsuya_Okumura>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kazuaki_J._Murakami>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kenta_Nakamura>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Makoto_Sugihara>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ryoichi_Inanami>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Taiga_Takata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tetsuya_Hasebe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yukihiro_Kawano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yusuke_Matsunaga>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISCAS.2006.1693146>
foaf:homepage <https://doi.org/10.1109/ISCAS.2006.1693146>
dc:identifier DBLP conf/iscas/SugiharaTNIHKHKMMO06 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISCAS.2006.1693146 (xsd:string)
dcterms:issued 2006 (xsd:gYear)
rdfs:label A character size optimization technique for throughput enhancement of character projection lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroaki_Hayashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Katsumi_Kishimoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Katsuya_Okumura>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kazuaki_J._Murakami>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kenta_Nakamura>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Makoto_Sugihara>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ryoichi_Inanami>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Taiga_Takata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tetsuya_Hasebe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yukihiro_Kawano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yusuke_Matsunaga>
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iscas/2006>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iscas/SugiharaTNIHKHKMMO06/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iscas/SugiharaTNIHKHKMMO06>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iscas/iscas2006.html#SugiharaTNIHKHKMMO06>
rdfs:seeAlso <https://doi.org/10.1109/ISCAS.2006.1693146>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iscas>
dc:title A character size optimization technique for throughput enhancement of character projection lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document