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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isie/IoslovichMG15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ilya_Ioslovich>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Per-Olof_Gutman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shai_Moshenberg>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISIE.2015.7281450>
foaf:homepage <https://doi.org/10.1109/ISIE.2015.7281450>
dc:identifier DBLP conf/isie/IoslovichMG15 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISIE.2015.7281450 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ilya_Ioslovich>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Per-Olof_Gutman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shai_Moshenberg>
swrc:pages 95-99 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isie/2015>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isie/IoslovichMG15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isie/IoslovichMG15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isie/isie2015.html#IoslovichMG15>
rdfs:seeAlso <https://doi.org/10.1109/ISIE.2015.7281450>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isie>
dc:title On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document