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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ispd/HengLL01>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fook-Luen_Heng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jennifer_Lund>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lars_Liebmann>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F369691.369729>
foaf:homepage <https://doi.org/10.1145/369691.369729>
dc:identifier DBLP conf/ispd/HengLL01 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F369691.369729 (xsd:string)
dcterms:issued 2001 (xsd:gYear)
rdfs:label Application of automated design migration to alternating phase shift mask design. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fook-Luen_Heng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jennifer_Lund>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lars_Liebmann>
swrc:pages 38-43 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ispd/2001>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ispd/HengLL01/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ispd/HengLL01>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ispd/ispd2001.html#HengLL01>
rdfs:seeAlso <https://doi.org/10.1145/369691.369729>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ispd>
dc:subject design migration, phase-shifting mask, resolution enchancement technique (xsd:string)
dc:title Application of automated design migration to alternating phase shift mask design. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document