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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ispd/Liebmann03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lars_Liebmann>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F640000.640026>
foaf:homepage <https://doi.org/10.1145/640000.640026>
dc:identifier DBLP conf/ispd/Liebmann03 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F640000.640026 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label Layout impact of resolution enhancement techniques: impediment or opportunity? (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lars_Liebmann>
swrc:pages 110-117 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ispd/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ispd/Liebmann03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ispd/Liebmann03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ispd/ispd2003.html#Liebmann03>
rdfs:seeAlso <https://doi.org/10.1145/640000.640026>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ispd>
dc:subject design for manufacturability, lithography, radically restricted designs, resolution enhancement techniques (xsd:string)
dc:title Layout impact of resolution enhancement techniques: impediment or opportunity? (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document