Lithography till the end of Moore's law. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

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dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Burn_J._Lin>
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dc:identifier	DBLP conf/ispd/Lin12 (xsd:string)
dc:identifier	DOI doi.org%2F10.1145%2F2160916.2160918 (xsd:string)
dcterms:issued	2012 (xsd:gYear)
rdfs:label	Lithography till the end of Moore's law. (xsd:string)
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rdfs:seeAlso	<https://doi.org/10.1145/2160916.2160918>
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dc:title	Lithography till the end of Moore's law. (xsd:string)
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