Impact of RET on physical layouts. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

Property	Value
dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/conf/ispd/SchellenbergC01>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Franklin_M._Schellenberg>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Luigi_Capodieci>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1145%2F369691.369731>
foaf:homepage	<https://doi.org/10.1145/369691.369731>
dc:identifier	DBLP conf/ispd/SchellenbergC01 (xsd:string)
dc:identifier	DOI doi.org%2F10.1145%2F369691.369731 (xsd:string)
dcterms:issued	2001 (xsd:gYear)
rdfs:label	Impact of RET on physical layouts. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Franklin_M._Schellenberg>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Luigi_Capodieci>
swrc:pages	52-55 (xsd:string)
dcterms:partOf	<https://dblp.l3s.de/d2r/resource/publications/conf/ispd/2001>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/conf/ispd/SchellenbergC01/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/conf/ispd/SchellenbergC01>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/conf/ispd/ispd2001.html#SchellenbergC01>
rdfs:seeAlso	<https://doi.org/10.1145/369691.369731>
swrc:series	<https://dblp.l3s.de/d2r/resource/conferences/ispd>
dc:subject	DFM, OPC, PSM, RET, lithography, off-axis illumination, phase-shifting, physical verification, simulation (xsd:string)
dc:title	Impact of RET on physical layouts. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:InProceedings
rdf:type	foaf:Document