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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ispd/TongLC09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chia-Wei_Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sao-Jie_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yang-Shan_Tong>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F1514932.1514959>
foaf:homepage <https://doi.org/10.1145/1514932.1514959>
dc:identifier DBLP conf/ispd/TongLC09 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F1514932.1514959 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label An automatic optical-simulation-based lithography hotspot fix flow for post-route optimization. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chia-Wei_Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sao-Jie_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yang-Shan_Tong>
swrc:pages 115-122 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ispd/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ispd/TongLC09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ispd/TongLC09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ispd/ispd2009.html#TongLC09>
rdfs:seeAlso <https://doi.org/10.1145/1514932.1514959>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ispd>
dc:subject hotspot, lithography, opc, routing (xsd:string)
dc:title An automatic optical-simulation-based lithography hotspot fix flow for post-route optimization. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document