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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isqed/ChangZWYB12>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Albert_H._Chang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Douglas_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Duane_S._Boning>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jean_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kewei_Zuo>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISQED.2012.6187493>
foaf:homepage <https://doi.org/10.1109/ISQED.2012.6187493>
dc:identifier DBLP conf/isqed/ChangZWYB12 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISQED.2012.6187493 (xsd:string)
dcterms:issued 2012 (xsd:gYear)
rdfs:label Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Albert_H._Chang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Douglas_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Duane_S._Boning>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jean_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kewei_Zuo>
swrc:pages 185-192 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isqed/2012>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isqed/ChangZWYB12/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isqed/ChangZWYB12>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isqed/isqed2012.html#ChangZWYB12>
rdfs:seeAlso <https://doi.org/10.1109/ISQED.2012.6187493>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isqed>
dc:title Test structure, circuits and extraction methods to determine the radius of infuence of STI and polysilicon pattern density. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document