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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isqed/ParkCRKPJPKYK02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chul-Hong_Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dong-Hyun_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jeong-Taek_Kong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ji-Soong_Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun-Seong_Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Moon-Hyun_Yoo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sang-Uhk_Rhie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Soo-Han_Choi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tae-Hwang_Jang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoo-Hyon_Kim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISQED.2002.996717>
foaf:homepage <https://doi.org/10.1109/ISQED.2002.996717>
dc:identifier DBLP conf/isqed/ParkCRKPJPKYK02 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISQED.2002.996717 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14¬Ķm DRAM Generation and Beyond. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chul-Hong_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dong-Hyun_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jeong-Taek_Kong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ji-Soong_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun-Seong_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Moon-Hyun_Yoo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sang-Uhk_Rhie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Soo-Han_Choi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tae-Hwang_Jang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoo-Hyon_Kim>
swrc:pages 143-147 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isqed/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isqed/ParkCRKPJPKYK02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isqed/ParkCRKPJPKYK02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isqed/isqed2002.html#ParkCRKPJPKYK02>
rdfs:seeAlso <https://doi.org/10.1109/ISQED.2002.996717>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isqed>
dc:title A Hybrid PPC Method Based on the Empirical Etch Model for the 0.14¬Ķm DRAM Generation and Beyond. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document