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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isqed/WangCKS05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Charles_C._Chiang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jamil_Kawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qing_Su>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xin_Wang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISQED.2005.8>
foaf:homepage <https://doi.org/10.1109/ISQED.2005.8>
dc:identifier DBLP conf/isqed/WangCKS05 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISQED.2005.8 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
rdfs:label A Min-Variance Iterative Method for Fast Smart Dummy Feature Density Assignment in Chemical-Mechanical Polishing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Charles_C._Chiang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jamil_Kawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qing_Su>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xin_Wang>
swrc:pages 258-263 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isqed/2005>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isqed/WangCKS05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isqed/WangCKS05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isqed/isqed2005.html#WangCKS05>
rdfs:seeAlso <https://doi.org/10.1109/ISQED.2005.8>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isqed>
dc:title A Min-Variance Iterative Method for Fast Smart Dummy Feature Density Assignment in Chemical-Mechanical Polishing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document