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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isqed/YenHLTKLCW23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chun-Yao_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hsin-Ping_Yen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ji-Fu_Kung>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kuang-Hsien_Tseng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shiuan-Hau_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yan-Hsiu_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yi-Ting_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yung-Chih_Chen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISQED57927.2023.10129375>
foaf:homepage <https://doi.org/10.1109/ISQED57927.2023.10129375>
dc:identifier DBLP conf/isqed/YenHLTKLCW23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISQED57927.2023.10129375 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chun-Yao_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hsin-Ping_Yen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ji-Fu_Kung>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kuang-Hsien_Tseng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shiuan-Hau_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yan-Hsiu_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yi-Ting_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yung-Chih_Chen>
swrc:pages 1-8 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isqed/2023>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isqed/isqed2023.html#YenHLTKLCW23>
rdfs:seeAlso <https://doi.org/10.1109/ISQED57927.2023.10129375>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isqed>
dc:title A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document