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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isqed/ZhouKALJNS09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kanak_Agarwal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nancy_Ying_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rajiv_V._Joshi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rouwaida_Kanj>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sani_R._Nassif>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weiping_Shi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhuo_Li_0001>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISQED.2009.4810363>
foaf:homepage <https://doi.org/10.1109/ISQED.2009.4810363>
dc:identifier DBLP conf/isqed/ZhouKALJNS09 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISQED.2009.4810363 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label The impact of BEOL lithography effects on the SRAM cell performance and yield. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kanak_Agarwal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nancy_Ying_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rajiv_V._Joshi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rouwaida_Kanj>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sani_R._Nassif>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weiping_Shi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhuo_Li_0001>
swrc:pages 607-612 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isqed/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isqed/ZhouKALJNS09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isqed/ZhouKALJNS09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isqed/isqed2009.html#ZhouKALJNS09>
rdfs:seeAlso <https://doi.org/10.1109/ISQED.2009.4810363>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isqed>
dc:title The impact of BEOL lithography effects on the SRAM cell performance and yield. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document