[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/isscc/Brink13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Martin_van_den_Brink>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FISSCC.2013.6487620>
foaf:homepage <https://doi.org/10.1109/ISSCC.2013.6487620>
dc:identifier DBLP conf/isscc/Brink13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FISSCC.2013.6487620 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Continuing to shrink: Next-generation lithography - Progress and prospects. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Martin_van_den_Brink>
swrc:pages 20-25 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/isscc/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/isscc/Brink13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/isscc/Brink13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/isscc/isscc2013.html#Brink13>
rdfs:seeAlso <https://doi.org/10.1109/ISSCC.2013.6487620>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/isscc>
dc:title Continuing to shrink: Next-generation lithography - Progress and prospects. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document