A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100¬Ķg/h/‚ąöHz Noise i Floor and Zero Stability of ¬Ī0.35mg/h.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/isscc/OliveiraPM22
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A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100¬Ķg/h/‚ąöHz Noise i Floor and Zero Stability of ¬Ī0.35mg/h.
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