A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/isscc/PrandiCCCBAO11
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A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout.
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A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout.
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