Micro-Electromechanical Systems (MEMS): Miniaturization Beyond Microelectronics.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/isss/Maluf99
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Micro-Electromechanical Systems (MEMS): Miniaturization Beyond Microelectronics.
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Micro-Electromechanical Systems (MEMS): Miniaturization Beyond Microelectronics.
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