MEMS Fabrication. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

Property	Value
dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/conf/itc/Fedder03>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Gary_K._Fedder>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1109%2FTEST.2003.1270898>
foaf:homepage	<https://doi.org/10.1109/TEST.2003.1270898>
dc:identifier	DBLP conf/itc/Fedder03 (xsd:string)
dc:identifier	DOI doi.org%2F10.1109%2FTEST.2003.1270898 (xsd:string)
dcterms:issued	2003 (xsd:gYear)
rdfs:label	MEMS Fabrication. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Gary_K._Fedder>
swrc:pages	691-698 (xsd:string)
dcterms:partOf	<https://dblp.l3s.de/d2r/resource/publications/conf/itc/2003>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/conf/itc/Fedder03/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/conf/itc/Fedder03>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/conf/itc/itc2003.html#Fedder03>
rdfs:seeAlso	<https://doi.org/10.1109/TEST.2003.1270898>
swrc:series	<https://dblp.l3s.de/d2r/resource/conferences/itc>
dc:title	MEMS Fabrication. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:InProceedings
rdf:type	foaf:Document