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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/itc/KrusemanMHEM04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ananta_K._Majhi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bram_Kruseman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Camelia_Hora>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Johan_Meirlevede>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stefan_Eichenberger>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTEST.2004.1386963>
foaf:homepage <https://doi.org/10.1109/TEST.2004.1386963>
dc:identifier DBLP conf/itc/KrusemanMHEM04 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTEST.2004.1386963 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
rdfs:label Systematic Defects in Deep Sub-Micron Technologies. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ananta_K._Majhi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bram_Kruseman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Camelia_Hora>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Johan_Meirlevede>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stefan_Eichenberger>
swrc:pages 290-299 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/itc/2004>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/itc/KrusemanMHEM04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/itc/KrusemanMHEM04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/itc/itc2004.html#KrusemanMHEM04>
rdfs:seeAlso <https://doi.org/10.1109/TEST.2004.1386963>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/itc>
dc:title Systematic Defects in Deep Sub-Micron Technologies. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document