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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/mates/MonchS03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lars_M%E2%88%9A%E2%88%82nch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marcel_Stehli>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-540-39869-1%5F14>
foaf:homepage <https://doi.org/10.1007/978-3-540-39869-1_14>
dc:identifier DBLP conf/mates/MonchS03 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-540-39869-1%5F14 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label An Ontology for Production Control of Semiconductor Manufacturing Processes. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lars_M%E2%88%9A%E2%88%82nch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marcel_Stehli>
swrc:pages 156-167 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/mates/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/mates/MonchS03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/mates/MonchS03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/mates/mates2003.html#MonchS03>
rdfs:seeAlso <https://doi.org/10.1007/978-3-540-39869-1_14>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/mates>
dc:title An Ontology for Production Control of Semiconductor Manufacturing Processes. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document