Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films.
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/mhs/LiuFKZI11
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Hedong_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Kenji_Fukuzawa
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Qingqing_Liu
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Shintaro_Itoh
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yosuke_Kajihara
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FMHS.2011.6102157
>
foaf:
homepage
<
https://doi.org/10.1109/MHS.2011.6102157
>
dc:
identifier
DBLP conf/mhs/LiuFKZI11
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FMHS.2011.6102157
(xsd:string)
dcterms:
issued
2011
(xsd:gYear)
rdfs:
label
Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Hedong_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Kenji_Fukuzawa
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Qingqing_Liu
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Shintaro_Itoh
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yosuke_Kajihara
>
swrc:
pages
51-54
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/mhs/2011
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/mhs/LiuFKZI11/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/mhs/LiuFKZI11
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/mhs/mhs2011.html#LiuFKZI11
>
rdfs:
seeAlso
<
https://doi.org/10.1109/MHS.2011.6102157
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/mhs
>
dc:
title
Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document