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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/mhs/MaetaniNSH14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junpei_Sakurai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seiichi_Hata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takuya_Maetani>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yutaka_Nakamitsu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMHS.2014.7006100>
foaf:homepage <https://doi.org/10.1109/MHS.2014.7006100>
dc:identifier DBLP conf/mhs/MaetaniNSH14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMHS.2014.7006100 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label Influence of target-target distance for composition distribution in new facing targets sputtering. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junpei_Sakurai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seiichi_Hata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takuya_Maetani>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yutaka_Nakamitsu>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/mhs/2014>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/mhs/MaetaniNSH14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/mhs/MaetaniNSH14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/mhs/mhs2014.html#MaetaniNSH14>
rdfs:seeAlso <https://doi.org/10.1109/MHS.2014.7006100>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/mhs>
dc:title Influence of target-target distance for composition distribution in new facing targets sputtering. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document