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dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mizue_Mizojiri>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sakurai_Junpei>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seiichi_Hata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shigetaka_Watanabe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yutaka_Nakamitsu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMHS.2014.7006094>
foaf:homepage <https://doi.org/10.1109/MHS.2014.7006094>
dc:identifier DBLP conf/mhs/WatanabeNJMH14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMHS.2014.7006094 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mizue_Mizojiri>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sakurai_Junpei>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seiichi_Hata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shigetaka_Watanabe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yutaka_Nakamitsu>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/mhs/2014>
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rdfs:seeAlso <https://doi.org/10.1109/MHS.2014.7006094>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/mhs>
dc:title Two-axis scanning micro mirror device with thick film metallic glass Cu-Zr-Ti and Parylene-C. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document