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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/mse/LucasOBP99>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Pine>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/N._Outaleb>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Olivier_Bonnaud>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sandrine_Lucas>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMSE.1999.787021>
foaf:homepage <https://doi.org/10.1109/MSE.1999.787021>
dc:identifier DBLP conf/mse/LucasOBP99 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMSE.1999.787021 (xsd:string)
dcterms:issued 1999 (xsd:gYear)
rdfs:label Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Pine>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/N._Outaleb>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Olivier_Bonnaud>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sandrine_Lucas>
swrc:pages 28-29 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/mse/1999>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/mse/LucasOBP99/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/mse/LucasOBP99>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/mse/mse1999.html#LucasOBP99>
rdfs:seeAlso <https://doi.org/10.1109/MSE.1999.787021>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/mse>
dc:title Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document