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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/mtdt/DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._VandeGoor>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/B._Borot>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/C._Julien>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._Duca>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._Heslinga>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Roy_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/F._Guyader>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/F._Lalanne>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/F._Pico>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/I._Thomas>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J.-P._Carrere>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Haond>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Lunenborg>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nicolas_Planes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/O._Hinsinger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P.-J._Goirand>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._Ferreira>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._Gayet>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._Vannier>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/R._Palla>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sylvie_Naudet>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Berger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thierry_Devoivre>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/W._J._Toren>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._Rody>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._Trouiller>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMTDT.2002.1029778>
foaf:homepage <https://doi.org/10.1109/MTDT.2002.1029778>
dc:identifier DBLP conf/mtdt/DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMTDT.2002.1029778 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC). (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._VandeGoor>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/B._Borot>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/C._Julien>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._Duca>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._Heslinga>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Roy_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/F._Guyader>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/F._Lalanne>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/F._Pico>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/I._Thomas>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J.-P._Carrere>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Haond>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Lunenborg>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nicolas_Planes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/O._Hinsinger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P.-J._Goirand>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._Ferreira>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._Gayet>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._Vannier>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/R._Palla>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sylvie_Naudet>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Berger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thierry_Devoivre>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/W._J._Toren>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._Rody>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._Trouiller>
swrc:pages 157-162 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/mtdt/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/mtdt/DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/mtdt/DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/mtdt/mtdt2002.html#DevoivreLJCFTVGBHVTRGPTGRBPNPDLHH02>
rdfs:seeAlso <https://doi.org/10.1109/MTDT.2002.1029778>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/mtdt>
dc:title Validated 90nm CMOS Technology Platform with Low-k Copper Interconnects for Advanced System-on-Chip (SoC). (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document