Design, fabrication and characterization of an őĪ - Si: H / őĪ - SiCN waveguide multistack for electro-optical modulation.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/nanonet/RaoNSCSS07
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Design, fabrication and characterization of an őĪ - Si: H / őĪ - SiCN waveguide multistack for electro-optical modulation.
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Design, fabrication and characterization of an őĪ - Si: H / őĪ - SiCN waveguide multistack for electro-optical modulation.
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