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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/CaoHZ21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tengjiang_Hu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tongtong_Cao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yulong_Zhao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS51815.2021.9451483>
foaf:homepage <https://doi.org/10.1109/NEMS51815.2021.9451483>
dc:identifier DBLP conf/nems/CaoHZ21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS51815.2021.9451483 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Design and Fabrication of A latching Silicon-based MEMS Switch. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tengjiang_Hu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tongtong_Cao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yulong_Zhao>
swrc:pages 1405-1409 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/CaoHZ21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/CaoHZ21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2021.html#CaoHZ21>
rdfs:seeAlso <https://doi.org/10.1109/NEMS51815.2021.9451483>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Design and Fabrication of A latching Silicon-based MEMS Switch. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document