Dry mechanical liftoff technology for metallization on parylene-C using SU-8.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/nems/ChangKT12
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Dry mechanical liftoff technology for metallization on parylene-C using SU-8.
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Dry mechanical liftoff technology for metallization on parylene-C using SU-8.
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