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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ChangSCHYH13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chin-Tien_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chun-Ming_Chang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Donyau_Chiang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mao-Jung_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-Jeng_Hsueh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2013.6559754>
foaf:homepage <https://doi.org/10.1109/NEMS.2013.6559754>
dc:identifier DBLP conf/nems/ChangSCHYH13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2013.6559754 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Surface property study of different patterning sapphire structures by ICP-RIE. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chin-Tien_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chun-Ming_Chang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Donyau_Chiang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mao-Jung_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-Jeng_Hsueh>
swrc:pages 372-375 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/ChangSCHYH13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/ChangSCHYH13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChangSCHYH13>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2013.6559754>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Surface property study of different patterning sapphire structures by ICP-RIE. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document