Surface property study of different patterning sapphire structures by ICP-RIE.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/nems/ChangSCHYH13
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/nems/ChangSCHYH13
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chin-Tien_Yang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chun-Ming_Chang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Donyau_Chiang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Mao-Jung_Huang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Wen-Jeng_Hsueh
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2013.6559754
>
foaf:
homepage
<
https://doi.org/10.1109/NEMS.2013.6559754
>
dc:
identifier
DBLP conf/nems/ChangSCHYH13
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FNEMS.2013.6559754
(xsd:string)
dcterms:
issued
2013
(xsd:gYear)
rdfs:
label
Surface property study of different patterning sapphire structures by ICP-RIE.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chin-Tien_Yang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chun-Ming_Chang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Donyau_Chiang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Mao-Jung_Huang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Wen-Jeng_Hsueh
>
swrc:
pages
372-375
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/nems/2013
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/nems/ChangSCHYH13/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/nems/ChangSCHYH13
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChangSCHYH13
>
rdfs:
seeAlso
<
https://doi.org/10.1109/NEMS.2013.6559754
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/nems
>
dc:
title
Surface property study of different patterning sapphire structures by ICP-RIE.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document