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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ChenWZL18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hua_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qi_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yifan_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zewen_Liu_0003>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2018.8557025>
foaf:homepage <https://doi.org/10.1109/NEMS.2018.8557025>
dc:identifier DBLP conf/nems/ChenWZL18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2018.8557025 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
rdfs:label Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hua_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qi_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yifan_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zewen_Liu_0003>
swrc:pages 511-514 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2018>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/ChenWZL18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/ChenWZL18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2018.html#ChenWZL18>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2018.8557025>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document