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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ChengZLTL15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bian_Tian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bo_Li_0108>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Cun_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rongjun_Cheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yulong_Zhao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2015.7147383>
foaf:homepage <https://doi.org/10.1109/NEMS.2015.7147383>
dc:identifier DBLP conf/nems/ChengZLTL15 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2015.7147383 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label Research on slide-film damping effect to achieve a high-performance resonant pressure senor. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bian_Tian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bo_Li_0108>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Cun_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rongjun_Cheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yulong_Zhao>
swrc:pages 99-102 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2015>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/ChengZLTL15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/ChengZLTL15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2015.html#ChengZLTL15>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2015.7147383>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Research on slide-film damping effect to achieve a high-performance resonant pressure senor. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document