A SOI-MEMS atmosphere pressure sensor and its low stress packaging.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/nems/DuZZLLFWSW14
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/nems/DuZZLLFWSW14
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Cheng_Liu
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Liang_Li
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Lidong_Du
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Mengying_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Shaohua_Wu
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Xiaolei_Wang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Xuejin_Sun
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Zhan_Zhao
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Zhen_Fang_0003
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2014.6908848
>
foaf:
homepage
<
https://doi.org/10.1109/NEMS.2014.6908848
>
dc:
identifier
DBLP conf/nems/DuZZLLFWSW14
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FNEMS.2014.6908848
(xsd:string)
dcterms:
issued
2014
(xsd:gYear)
rdfs:
label
A SOI-MEMS atmosphere pressure sensor and its low stress packaging.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Cheng_Liu
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Liang_Li
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Lidong_Du
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Mengying_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Shaohua_Wu
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Xiaolei_Wang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Xuejin_Sun
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Zhan_Zhao
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Zhen_Fang_0003
>
swrc:
pages
454-457
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/nems/2014
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/nems/DuZZLLFWSW14/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/nems/DuZZLLFWSW14
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/nems/nems2014.html#DuZZLLFWSW14
>
rdfs:
seeAlso
<
https://doi.org/10.1109/NEMS.2014.6908848
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/nems
>
dc:
title
A SOI-MEMS atmosphere pressure sensor and its low stress packaging.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document