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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/LiXW10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jing_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sihua_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yaming_Wu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2010.5592576>
foaf:homepage <https://doi.org/10.1109/NEMS.2010.5592576>
dc:identifier DBLP conf/nems/LiXW10 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2010.5592576 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
rdfs:label Design and fabrication of a high fill-factor micro-mirror array. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jing_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sihua_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yaming_Wu>
swrc:pages 1048-1051 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2010>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/LiXW10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/LiXW10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiXW10>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2010.5592576>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Design and fabrication of a high fill-factor micro-mirror array. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document