[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/LinHYTF14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/C._Fu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._Tseng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/T._Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._Yang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2014.6908873>
foaf:homepage <https://doi.org/10.1109/NEMS.2014.6908873>
dc:identifier DBLP conf/nems/LinHYTF14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2014.6908873 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label Throughput comparison of multi-exposure and multi-beam laser interference lithography on nano patterned sapphire substrate process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/C._Fu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._Tseng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/T._Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._Yang>
swrc:pages 555-559 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2014>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/LinHYTF14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/LinHYTF14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2014.html#LinHYTF14>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2014.6908873>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Throughput comparison of multi-exposure and multi-beam laser interference lithography on nano patterned sapphire substrate process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document