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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/LiuLLHH10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bo_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xunjun_He>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yilong_Hao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhihong_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhiqiu_Lv>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2010.5592479>
foaf:homepage <https://doi.org/10.1109/NEMS.2010.5592479>
dc:identifier DBLP conf/nems/LiuLLHH10 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2010.5592479 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
rdfs:label A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bo_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xunjun_He>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yilong_Hao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhihong_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhiqiu_Lv>
swrc:pages 620-623 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2010>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/LiuLLHH10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/LiuLLHH10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2010.html#LiuLLHH10>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2010.5592479>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document