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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/LuZLXCWC19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bo_Xie_0006>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Deyong_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jian_Chen_0012>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junbo_Wang_0002>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sen_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yadong_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yulan_Lu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2019.8915640>
foaf:homepage <https://doi.org/10.1109/NEMS.2019.8915640>
dc:identifier DBLP conf/nems/LuZLXCWC19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2019.8915640 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bo_Xie_0006>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Deyong_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jian_Chen_0012>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junbo_Wang_0002>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sen_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yadong_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yulan_Lu>
swrc:pages 488-491 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/LuZLXCWC19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/LuZLXCWC19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2019.html#LuZLXCWC19>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2019.8915640>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document