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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/MaoYLY09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guizhen_Yan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xu_Mao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhenchuan_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhihong_Li>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2009.5068629>
foaf:homepage <https://doi.org/10.1109/NEMS.2009.5068629>
dc:identifier DBLP conf/nems/MaoYLY09 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2009.5068629 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label The method of prevent footing effect in making SOI micro-mechanical structure. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guizhen_Yan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xu_Mao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhenchuan_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhihong_Li>
swrc:pages 506-509 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/MaoYLY09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/MaoYLY09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2009.html#MaoYLY09>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2009.5068629>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title The method of prevent footing effect in making SOI micro-mechanical structure. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document