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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/MiaoJLZZSG09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hongguang_Liao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Liwei_Zhao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Min_Miao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xin_Sun_0003>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yufeng_Jin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yunhui_Zhu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yunxia_Guo>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2009.5068533>
foaf:homepage <https://doi.org/10.1109/NEMS.2009.5068533>
dc:identifier DBLP conf/nems/MiaoJLZZSG09 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2009.5068533 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hongguang_Liao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Liwei_Zhao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Min_Miao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xin_Sun_0003>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yufeng_Jin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yunhui_Zhu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yunxia_Guo>
swrc:pages 90-93 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/MiaoJLZZSG09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/MiaoJLZZSG09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2009.html#MiaoJLZZSG09>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2009.5068533>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document