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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/QianYHS21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huijun_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jie_Hu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lei_Qian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wenjiang_Shen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS51815.2021.9451299>
foaf:homepage <https://doi.org/10.1109/NEMS51815.2021.9451299>
dc:identifier DBLP conf/nems/QianYHS21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS51815.2021.9451299 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huijun_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jie_Hu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lei_Qian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wenjiang_Shen>
swrc:pages 407-411 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/QianYHS21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/QianYHS21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2021.html#QianYHS21>
rdfs:seeAlso <https://doi.org/10.1109/NEMS51815.2021.9451299>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document