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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/RanWHCHZ23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Binlei_Cao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jiangbo_He>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Longqi_Ran>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wu_Zhou_0003>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yichuan_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zongda_Hu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS57332.2023.10190975>
foaf:homepage <https://doi.org/10.1109/NEMS57332.2023.10190975>
dc:identifier DBLP conf/nems/RanWHCHZ23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS57332.2023.10190975 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Binlei_Cao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jiangbo_He>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Longqi_Ran>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wu_Zhou_0003>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yichuan_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zongda_Hu>
swrc:pages 62-65 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/RanWHCHZ23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/RanWHCHZ23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2023.html#RanWHCHZ23>
rdfs:seeAlso <https://doi.org/10.1109/NEMS57332.2023.10190975>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document