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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/RenWCFNL20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haichao_Cao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hao_Ren>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sitao_Fei>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weimin_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yunping_Niu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhihao_Li>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS50311.2020.9265626>
foaf:homepage <https://doi.org/10.1109/NEMS50311.2020.9265626>
dc:identifier DBLP conf/nems/RenWCFNL20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS50311.2020.9265626 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haichao_Cao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hao_Ren>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sitao_Fei>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weimin_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yunping_Niu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhihao_Li>
swrc:pages 545-548 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/RenWCFNL20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/RenWCFNL20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2020.html#RenWCFNL20>
rdfs:seeAlso <https://doi.org/10.1109/NEMS50311.2020.9265626>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Scaling Effect Induced Rapid Quenching Improves the Performance of Microfabricated Electrostatic Micromirrors. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document