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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/TangLHWSY15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chih-Sheng_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun-Sheng_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tsung-Tao_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsiang_Tang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsin_Lin_0003>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2015.7147453>
foaf:homepage <https://doi.org/10.1109/NEMS.2015.7147453>
dc:identifier DBLP conf/nems/TangLHWSY15 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2015.7147453 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label Investigation of fabricated Through Glass Via (TGV) process by inductively coupled plasma reactive ion etching of quartz glass. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chih-Sheng_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun-Sheng_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ming-Hua_Shiao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tsung-Tao_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsiang_Tang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsin_Lin_0003>
swrc:pages 401-404 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2015>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/TangLHWSY15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/TangLHWSY15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2015.html#TangLHWSY15>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2015.7147453>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Investigation of fabricated Through Glass Via (TGV) process by inductively coupled plasma reactive ion etching of quartz glass. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document