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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/VoCC22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pin-Chuan_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tuan_Ngoc_Anh_Vo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsiang_Chen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS54180.2022.9791205>
foaf:homepage <https://doi.org/10.1109/NEMS54180.2022.9791205>
dc:identifier DBLP conf/nems/VoCC22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS54180.2022.9791205 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pin-Chuan_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tuan_Ngoc_Anh_Vo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu-Hsiang_Chen>
swrc:pages 1-5 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/VoCC22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/VoCC22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2022.html#VoCC22>
rdfs:seeAlso <https://doi.org/10.1109/NEMS54180.2022.9791205>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document