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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/WangYCSF19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lining_Sun>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mingyu_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_Chen_0010>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshio_Fukuda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhan_Yang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2019.8915647>
foaf:homepage <https://doi.org/10.1109/NEMS.2019.8915647>
dc:identifier DBLP conf/nems/WangYCSF19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2019.8915647 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Motion control of nanomanipulation platform based on feedforward compensation inside SEM. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lining_Sun>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mingyu_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_Chen_0010>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshio_Fukuda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhan_Yang>
swrc:pages 370-374 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/WangYCSF19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/WangYCSF19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2019.html#WangYCSF19>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2019.8915647>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Motion control of nanomanipulation platform based on feedforward compensation inside SEM. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document