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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/WenZYCW11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hai_Wang_0018>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hongjiang_Zeng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jiaru_Chu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Li_Wen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zheng_Yuan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2011.6017435>
foaf:homepage <https://doi.org/10.1109/NEMS.2011.6017435>
dc:identifier DBLP conf/nems/WenZYCW11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2011.6017435 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hai_Wang_0018>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hongjiang_Zeng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jiaru_Chu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Li_Wen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zheng_Yuan>
swrc:pages 634-637 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/WenZYCW11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/WenZYCW11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2011.html#WenZYCW11>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2011.6017435>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Simulation and experiments of intrinsic bending of multilayer microcantilever for maskless scanning plasma etching. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document